Device for measuring temperature distribution of heater and method for using said device

Abstract

Abstract PURPOSE:To enable exact measurement of the temp. distribution of a heater of a device for pulling up a semiconductor single crystal with good reproducibility by measuring the temp. of said heater in the temp. environment approximately equal to the environment in the stage of an actual operation. CONSTITUTION:One or more mechanisms 18 for measuring temp. distribution each consisting of a temp. sensor 16 fixed via a fixture 15 to a freely vertically movable and rotatably supporting shaft 14 penetrating airtightly through a hermetic vessel 13 provided with ventilation pipe 11, 12 for evacuation and inflow and outflow of an inert gas are provided to said vessel. A temp. control sensor mechanism 22 consisting of a dummy crucible receiving tray 20 embedded with a sensor 21 for temp. control is provided to a freely rotatable shaft 19 penetrating airtightly throught the vessel 13 so as to face the shaft 14. A carbon heater 1 is attached to an attaching mechanism 24 contg. a holding cylinder 25 and an electrode 23 and while the inside of the vessel 13 is evacuated to a vacuum, heating current is passed to the heater 1 to bake the heater 1 and the cylinder 25 at and for a prescribed temp. and time. The atmosphere in the vessel 13 is thereafter substd. with an inert gas or is kept under the vacuum as it is and the temp. distribution of the heater 1 is measured by operating the mechanism 18.

Inventors

• 👤 Kiyoshi Yoshikawa
• 👤 吉川　清

Bibliographic Details