Optical photodetector

Abstract

Abstract PURPOSE:To make an optical photodetector small-sized, and also to lower a loading height of the optical photodetector by reflecting an emitted light of an optical fiber wired in parallel on a photodetector substrate, by a reflecting wall surface of an optical fiber holding substrate, and projecting it to a photodetecting surface of the photodetector. CONSTITUTION:A V-groove 8 is etched and formed in parallel at a pitch equal to a parallel pitch of a photodetector, on the surface of an optical fiber holding substrate 7 of a square plate shape consisting of silicon, and this V-groove 8 is formed deeply enough so that an optical fiber 4 can be inserted. Also, a recessed groove 9 orthogonal to the V-groove 8 is etched and formed on the surface of the optical fiber holding substrate 7, so as to cut off the end part of the opposite side to the opening side of the V-groove 8, and these V-groove 8 and recessed groove 9 can form a side wall easily and smoothly on the inclined surface by an anisotropic etching liquid. Accordingly, the side wall of the opposite side to the V-groove 8 of the recessed groove 9 is inclined and constitutes a reflecting wall surface 10. Therefore, in case when the optical fiber 4 is inserted and fixed into the V-groove 8, the reflecting wall surface 10 reflects the emitted light from the optical fiber 4, in the direction of the surface of the optical fiber holding substrate 7.

Inventors

• 👤 Tetsuo Horimatsu
• 👤 哲夫 堀松

Bibliographic Details