Patent JPS60165722A successfully refreshed from Google Patents.
JPS60165722A
Expired / Lapsed
JP
⏱️ 0.0 years remaining
Etching method
Assignee: International Business Machines Corp
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Filing: 1984-11-20
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Granted: —
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Expires: 2004-11-20
Abstract
Abstract Translated from Japanese (57)【要約】本公報は電子出願前の出願データであるた め要約のデータは記録されません。 (57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Inventors
- 👤 リー、チエン
- 👤 ガンガダーラ、スワミ、マサド
Bibliographic Details
Application Number
—
Jurisdiction
JP
Data Source
google_patents
Last Synchronized
2026-11-09 04:12
CPC Classifications
H; H10; H10P; H10P95/00; H10P95/06; H10P95/062; H10P95/064; H10P50/00; H10P50/20; H10P50/28; H10P50/282; H10P50/283; H10P50/286; H10P50/287
Claims Analysis
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References Cited (Backward Citations)
JPS5617042A
Cited
JPS58182833A
Cited
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