Production of hologram diffraction grating

Abstract

Abstract PURPOSE:To improve the strength of a diffraction grating pattern consisting of photoresist and to prevent effectively cracking of the diffraction grating pattern under environmental conditions by coating a silane coupling agent as a precoating layer. CONSTITUTION:A silane coupling agent has a group bondable with an org. resin and a group bondable with an inorg. group and is gamma-glycydoxypropyl trimethoxysilane, etc. The treatment is executed by dissolving said agent in a solvent and coating and drying the soln. Photoresist is then coated thereon and is subjected to holorgram recording. For example, a diffraction grating 35 is formed via silane coupling agent coating layer 33 on a glass substrate 31. An inter-grating spacing D can be controlled by the angle between the two luminous fluxes interfered on the photoresist and the wavelengths of the luminous fluxes. A grating depth (h) can be controlled by controlling prebaking conditions, exposing time, developing time and concn. of a developing soln. The grating is then subjected to necessary post treatments such as rinsing, drying and post baking.

Inventors

• 👤 Koji Ujiie
• 👤 氏家　孝二
• 👤 Toru Oda
• 👤 徹 織田

Bibliographic Details