Cooling trap for vacuum

Abstract

Abstract PURPOSE:To provide a light wt. and low cost cooling trap for vacuum reduced in the consumption of a cooling medium, obtained by performing piping onto an arbitrarily moldable heat conductive substrate with a single stroke of the brush so as to always pass a cooling medium through the formed piping to cool the substrate. CONSTITUTION:A cooling medium passing pipe 2 is arranged to a substrate comprising alumina having good heat conductivity and arbitrary moldability with a single stroke of the brush so as to provide proper intervals between horizontal leg parts of said pipe 2 if necessary. In this case, an inlet 3 and an outlet 4 of a cooling medium are provided to the pipe 2. The substrate 1 is molded into a proper shape and one end of the pipe 2 is closed while pressurization is performed from the other end thereof to enlarge the inner diameter of the pipe 2. By this method, a cooling trap for ultra-high vacuum can be prepared.

Inventors

• 👤 Hajime Ishimaru
• 👤 石丸　肇
• 👤 Masao Miyamoto
• 👤 正夫 宮本
• 👤 Shojiro Komaki
• 👤 小牧　昭二郎

Bibliographic Details