Production of diamond

Abstract

Abstract PURPOSE:To increase the growth rate of diamond, by forming a plasma of a mixture of a specific saturated hydrocarbon containing tertiary or quaternary carbon atom and hydrogen under low pressure. CONSTITUTION:The valve 9 is closed, the reaction tube 5 is evacuated to <=10<-5>Torr by a vacuum pump 6, and the valves 3, 9 are opened to pass hydrogen gas through the tube at a definite rate of flow. The output of the microwave oscillator 13 or the high-frequency oscillator 16 is raised, and the microwave is irradiated through a waveguide 15. Plasma is generated by the irradiation by using a matching transformer for the microwave. As an alternative method, plasma is generated by the high-frequency induction coil 17. The valve 8 is opened, and the hydrocarbon is supplied from the hydrocarbon supplying apparatus 2 at a definite rate accompanied with the hydrogen gas flow controlled to a definite flow rate by the flow meter 4. Diamond is formed on a substrate 12 supported by the substrate support 11.

Inventors

• 👤 Katsuyuki Nakamura
• 👤 克之 中村
• 👤 Susumu Kawachi
• 👤 河内　進

Bibliographic Details