Detecting system of scanning position

Abstract

Abstract PURPOSE:To detect accurately a scanning position with low cost by forming a face opposite to the scale face of a scale member as a ground glass diffusion face so as to confine a light beam made incident from the scale face in the inside of the scale member. CONSTITUTION:The scale face 14 setting a scale with an accurate position accuracy by an optical mask 13 with metal evaporation on a surface 12 of a glass polished flat is formed in a standard scale member A, and a face opposite to the scale face 14 is formed as the ground glass diffusion face 15. The light beam through a light transmission section 20 of the scale face 14 is diffused on the diffusion face 15 and confined in the scale member A. The confined light is reflected to the inside with the metallic mask 13 of the scale face 14, propagated toward a side face 17 and detected by a photodetector 18.

Inventors

• 👤 Satoshi Itami
• 👤 伊丹　敏
• 👤 Fumitaka Abe
• 👤 文隆 安部
• 👤 Takashi Morihara
• 👤 隆 森原

Bibliographic Details