Surface acoustic wave element and its manufacture

Abstract

Abstract PURPOSE:To prevent damage of a wafer and an electrode due to the pyroelectric effect, by forming an electrode required for the function of a surface acoustic wave element and an electrode connecting the former electrode to the wafer. CONSTITUTION:The electrodes 21, 23 are connected electrically with the connecting electrode 60, the electrodes 21, 31 are with the connecting electrode 61, the electrodes 22, 36 are with the connecting electrode 62, the electrodes 23, 32 are with the connecting electrode 63, the electrodes 24, 35 are with the connecting electrode 64, the electrodes 21, 22, 37 and 38 are with the connecting electrode 65, and the electrodes 23, 24, 33 and 34 are connected electrically with the connecting electrode 66 respectively. Since elements other than the surface acoustic wave element 11 are constituted similarly, the electrodes required for the function of the surface acoustic wave element formed on the wafer 4 are connected electrically with the connecting electrodes entirely. Even if the temperature of the substrate changes rapidly in the manufacture process, a voltage caused by the pyroelectric effect is not applied between each electrode and no distortion is produced to the wafer, then the wafer and the electrodes are not damaged.

Inventors

• 👤 Akira Miyajima
• 👤 宮島　明
• 👤 Akira Tsuzuki
• 👤 都筑　明

Bibliographic Details