Manufacture of radiation detector

Abstract

Abstract PURPOSE:To improve the performance and the yield with a higher machining accuracy by forming a groove on the top of a photosensitive resin sheet prodcuced by coating on one side of a substrate or processed as such beforehand by photoetching instead of mechanical working. CONSTITUTION:A photosensitive resin sheet 12 is produced by applying a photosensitive resin 12 on one surface of a substrate 11 or processed into a sheet beforehand and an ultraviolet ray, electron beam, X-ray or the like radiates the top of the photosensitive resin sheet 12 from the direction as indicated by the arrow through a photomask 13 with several straight lines drawn thereon. Then, unhardened parts or decomposed parts of the photosensitive resin 12 are washed off thoroughly water or water containing alcohol, a surfactant or the like to form grooves 14. Both upper and lower ends of electrode plates 17 are inserted sequentially into the grooves 14 using the resin plate 15 thus obtained as support plate 16. In this manner, the electrode plates 17 are mounted between a pair of the support plates 16.

Inventors

• 👤 Masayuki Yamamoto
• 👤 正之 山本

Bibliographic Details