Probing device

Abstract

Abstract PURPOSE:To prevent the re-execution of a die sort by detecting a defective mark and automatically stopping probing while displaying the stoppage when the mark is abnormal. CONSTITUTION:The properties of chips are measured by probes 19-21 and acceptables or defectives are decided, and the acceptables are forwarded to the next process. A mark 15 is put to the defective by an inker 16, and photographed by a camera 17, a pattern of the mark is recognized 18, and the chip is forwarded to the next process when the mark is normal. When the pattern is abnormal, the abnormality is displayed while probing is stopped. The inker 16 is adjusted at that time. Consequently, normal defective marks can be formed after that. According to the constitution, the re-execution of the die sort is avoided, and workability is improved.

Inventors

• 👤 Matsuki Kawakami
• 👤 川上　末喜

Bibliographic Details