solar cells

Abstract

Abstract PURPOSE:To prevent the deterioration in the quality of a transparent conductive film and an amorphous Si layer by accumulating a thin film which contains as main ingredients carbon and hydrogen on the transparent conductive film which contains as main ingredients oxides of In, Sn and the like and accumulating an amorphous Si layer thereon. CONSTITUTION:A transparent conductive film 11 which contains as main ingredients oxides of In, Sn and the like is formed on a light transmission glass substrate 10. A thin film 12 which contains as main ingredients carbon and hydrogen on the film. Then, amorphous Si layers are formed thereon in the sequence of a P type layer 13, a non-doped layer 14 and an N type layer 15. Subsequently, an ohmic contact electrode 16 is formed. With this configuration, the denaturation both of the transparent conductive film and the amorphous Si can be prevented.

Inventors

• 👤 Shinichi Muramatsu
• 👤 信一 村松
• 👤 Juichi Shimada
• 👤 嶋田　寿一
• 👤 Sunao Matsubara
• 👤 松原　直
• 👤 Akira Goto
• 👤 明 後藤
• 👤 Masatoshi Utaka
• 👤 正俊 右高

Bibliographic Details