Amorphous solar battery

Abstract

Abstract PURPOSE:To increase the effective light-receiving area as well as to raise the efficiency of the titled solar battery by a method wherein a non-oxidized collecting electrode is sandwitched between a glass substrate and a transparent conductive film. CONSTITUTION:A collecting electrode 5 is vapor-deposited on a substrate 1, and a transparent conductive film 2 is vapor-deposited thereon. As the temperature of the substrate is to be maintained at 300-400 deg.C when the transparent conductive film 2 is vapor-deposited, the Al, Mo, Ni-Cr and the like to be used for the collecting electrode 5 is oxidized and specific resistance is increased unless an additional process is performed. In order to prevent the above phenomenon, the processes from the vapor-deposition of the collecting electrode 5 to the vapor-deposition of the transparent conductive film 2 are performed in a reducing gas such as hydrogen and the like, without exposing the material to be processed to the air. By utilizing the above method, the oxidization of Al, Mo, Ni-Cr and the like of the collecting electrode 5 can be prevented, thereby enabling to obtain the collecting electrode 5 having a small specific resistance.

Inventors

• 👤 Yukihisa Takeuchi
• 👤 幸久 竹内
• 👤 Masaaki Mori
• 👤 正昭 森
• 👤 Kenji Maekawa
• 👤 前川　謙二
• 👤 Toshiaki Nishizawa
• 👤 西沢　俊明

Bibliographic Details