Electrophotogrpahic receptor

Abstract

Abstract PURPOSE:To prevent the cracking and stripping of an amorphous silicon layer, by forming an intermediate layer contg. Al on an electrically conductive substrate made of an Al material and the amorphous silicon layer on the intermediate layer. CONSTITUTION:An intermediate layer 4 contg. Al and one or more among Si, C, O, N and H is formed on an electrically conductive substrate 3' made of an Al material by decomposing gaseous aluminum chloride (AlCl3) or trimethyl aluminum [Al(CH3)3] by glow discharge. An amorphous silicon layer 5 is then formed on the layer 4 by the glow discharge of gaseous silane (SiH4) or the like. Stress acting on the boundary between the layers 3, 5 owing to the difference in coefft. of thermal expansion between Al and amorphous silicon is relieved by the layer 4 whose coefft. of thermal expansion is between the coeffts. of Al and amorphous silicon, so the cracking and stripping of the layer 5 can be prevented.

Inventors

• 👤 Hideji Yoshizawa
• 👤 吉澤　秀二

Bibliographic Details