Film forming member heating device

Abstract

Abstract PURPOSE:To maintain always the specified temp. of a rotary casing to which a film forming member is attached and to obtain the stable accuracy in temp. control by providing airtightly and freely rotatably the casing in a vacuum vessel, maintaining the inside of the casing under atm. pressure and providing a heater. CONSTITUTION:A rotary casing 10 consisting of a body 11 and a tubular part 12 is airtightly provided in a vacuum vessel 1 and the inside of the casing 10 is maintained under atm. pressure. A heater 40 is provided in the casing apart therefrom. A film forming member A is placed on the casing 10 and the casing 10 is rotated via gears 33, 34 by means of a motor 32. The casing is heated by the heater 40. The heater 40 is housed in the casing 10 kept under the atm. pressure and therefore there is no unevenness in the heat radiating capacity and the casing is heated to a specified temp., so that the product having good quality is obtd. under high accuracy in temp. control.

Inventors

• 👤 Naoichiro Tanno
• 👤 淡野　直一郎

Bibliographic Details