Position checking device for parts attached to substrate

Abstract

Abstract PURPOSE:To check the positions of parts automatically by projecting a laser beam from above a substrate and detecting reflected light from the mounted parts by an optical sensor. CONSTITUTION:The laser beam 7 from a laser light source 4 scans on the substrate 2 to be checked on a conveyance stage 10 in an X direction through a projection lens and an oscillating mirror 6. A Y-directional scan is made by moving the stage 10. The reflected light is made incident to a photodetecting element 9 through a condenser lens 8. The difference in height between a component 1 and a making 2-3 is utilized to discriminate between reflected light beams from the both, so the position and falling of the component 1 are checked automatically.

Inventors

• 👤 Hozumi Yamamoto
• 👤 山本　穂積
• 👤 Yasuo Hachikake
• 👤 保夫 八掛
• 👤 Yasuo Takenaka
• 👤 竹中　泰雄
• 👤 Koichi Masuda
• 👤 耕一 増田

Bibliographic Details