Semiconductor type flow rate detecting apparatus

Abstract

Abstract PURPOSE:To contrive to enhance the durability and response of the titled apparatus, by supporting a first semiconductor chip to which a temp. detecting element is formed and a second semiconductor chip having a heater and a temp. detecting element formed thereto in close vicinity to a casing. CONSTITUTION:For example, four projected support parts 24 are formed to the notch part of a substrate 23 and chips 21, 22 are exposed to an air stream at this part. The substrate 23 is supported in a state received in a casing 112 which is, in turn, constituted of a projected upper casing 25A and a recessed lower casing 25B. The inflow port 112A of the casing 112 is formed into a bell mouth shape so as to allow the air stream to flow into a passage 111 without disturbing the flow thereof into said passage 111. The inner surface X of the upper casing 25A is formed into a structure protruded to a semiconductor chip side so as to obliquely blow the air stream to the chip 22. By this mechanism, a flow rate can be detected with high accuracy without applying the influence of the upstream side chip 21 to the downstream side chip 22.

Inventors

• 👤 Kazuhiko Miura
• 👤 和彦 三浦
• 👤 Tadashi Hattori
• 👤 正 服部
• 👤 Yukio Iwasaki
• 👤 幸雄 岩崎
• 👤 Tokio Kohama
• 👤 時男 小浜
• 👤 Kenji Kanehara
• 👤 賢治 金原

Bibliographic Details