Patent JPS59140366A successfully refreshed from Google Patents.
JPS59140366A
Expired / Lapsed
JP
⏱️ 0.0 years remaining
Method and device for producing thin film
Assignee: National Institute of Advanced Industrial Science and Technology
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Filing: 1983-12-27
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Granted: —
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Expires: 2003-12-27
Abstract
Abstract Translated from Japanese (57)【要約】本公報は電子出願前の出願データであるた め要約のデータは記録されません。 (57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Inventors
- 👤 Osamu Tabata
- 👤 田畑 収
- 👤 Saburo Kimura
- 👤 三郎 木村
Bibliographic Details
Application Number
—
Jurisdiction
JP
Data Source
google_patents
Last Synchronized
2026-11-06 13:31
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/04; C23C16/047; C23C16/44; C23C16/48; C23C16/483
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
JPS5565428A
Cited
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