Planar-hall element

Abstract

Abstract PURPOSE:To obtain desired magnetism sensing characteritics by applying force to the film of a ferromagnetic substance by coating an insulating substrate with the film while forming the planar-Hall element held and formed under a state that force is applied to the film. CONSTITUTION:The insulating substrate is coated with the film of an iron-nickel alloy as the ferromagnetic substance through vaccum deposition, etc. while the planar-Hall element is held and formed under the state that force is applied to the film, and the insulating substrate is obtained by coating a glass plate 1 with the film 2 of the iron-nickel alloy in approximately 0.1mum thickness through vacuum deposition. When a magnetic field is vertically applied to currents I in the surface of the film 2 under a state tha currents are flowed between terminals 3, 4, Hall voltage VH is generated between terminals 5, 6. Accordingly, it is considered that the change of the magnetism sensing characteristics through the application of force to the film of the ferromagnetic substance depends upon the degree of arrangement of magnetization in the film of the ferromagnetic substance.

Inventors

• 👤 Kazuhiro Sato
• 👤 和洋 佐藤
• 👤 Katsuhiko Oguri
• 👤 克彦 小栗

Bibliographic Details