Patent JPS587829A successfully refreshed from Google Patents.
JPS587829A
Expired / Lapsed
JP
⏱️ 0.0 years remaining
Dry etching method
Assignee: Toshiba Corp
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Filing: 1981-07-08
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Granted: —
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Expires: 2001-07-08
Abstract
Abstract Translated from Japanese (57)【要約】本公報は電子出願前の出願データであるた め要約のデータは記録されません。 (57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Inventors
- 👤 Haruo Okano
- 👤 晴雄 岡野
- 👤 Yasuhiro Horiike
- 👤 靖浩 堀池
- 👤 Takashi Yamazaki
- 👤 隆 山崎
Bibliographic Details
Application Number
—
Jurisdiction
JP
Data Source
google_patents
Last Synchronized
2026-11-09 09:02
CPC Classifications
H; H10; H10P; H10P50/00; H10P50/20; H10P50/26; H10P50/264; H10P50/266; H10P50/267; H10P50/268
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
JPS5437580A
Cited
JPS55119177A
Cited
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