Electrostatic capacity type pressure sensor

Abstract

Abstract PURPOSE:To reduce floating capacity, and also to elevate both adjustment and a mass-production property, by forming an electrode on a surface where a substrate and a diaphragm are opposed to each other, storing it in a metallic case holding its airtightness, and forming a capsule part. CONSTITUTION:A capsule part 1 is formed byproviding thin film electrodes 13 which are both opposed to one surface of an alumina substrate 11 and one surface of an alumina substrate 12 forming a diaphragm, printing glass layers 14, joining together and seal-sticking them between said surfaces, subsequently, covering them with an aluminum case 2 through a silicone rubber ring 3, and caulking them mechanically. After that, it is incorporated in a housing 21 together with a circuit part 22 for converting the capacity to voltage, by which an electrostatic capacity type pressure sensor is formed. Accordingly, since the capsule part 1 is cased in advance, its floating capacity can be reduced, also durability of its structure is elevated, and its adjustment and mass production can be executed easily.

Inventors

• 👤 Osamu Makino
• 👤 治 牧野
• 👤 Toru Ishida
• 👤 徹 石田
• 👤 Seiji Oikawa
• 👤 及川　清司
• 👤 Jun Yasuda
• 👤 純 安田

Bibliographic Details