Gas laser device

Abstract

Abstract PURPOSE:To maintain stable discharging state of a gas laser device by forming each rod-shaped electrode in an outer wall conductive heat pipe, thereby providing cooling operation capability at the electrode itself. CONSTITUTION:A plurality of anodes 2, 2,... supported by an electrically insulating support plate 1 are all formed of outer wall conductive heat pipe, and are sequentially arranged at the prescribed interval to oppose to the surface of a cathode 3 at the ends and to direct toward the longitudinal direction of the cathode 3. The upper end of the anodes 2 are commonly connected through a stable resistor 4 to a power source 4. Trigger electrodes 6 are provided to lower the starting discharging voltage, and are normally used in plural number. When a discharge is started between the anodes 2 and the cathode 3, the ends of the anodes 2 are heated, but since the anodes 2 made of the heat pipes operate to transfer heat from high temperature unit to low temperature unit, thereby performing self-cooling operation to suppress the temperature of the anodes 2 to raise to excessively high temperature.

Inventors

• 👤 Koichi Goto
• 👤 後藤　幸一
• 👤 Akira Okamoto
• 👤 晃 岡本
• 👤 Akira Egawa
• 👤 明 江川

Bibliographic Details