Defect inspection method

Abstract

Abstract PURPOSE:To penetrate the light reflected by a sample surface having the curvature into a microscope to convert the sample surface into the same observing status as a plane by irradiating scattered light to the sample surface. CONSTITUTION:A scattering body part 10 on which a sample 12 is held is arranged on an X-Y stage 11. The surface of the sample 12 is observed through a microscope unit 4. Directional illuminating light 7 irradiated from a reflecting and lighting device 3 is irradiated to the surface of the sample 12 through the scattering body part 10. As the result, a part of the reflected light 18 reflected by the surface of the sample 12 is penetrated into an objective lens 5. A non-defective surface 20 in an area 19 in which the light 18 reflected by the surface of the sample 12 is penetrated into the objective lens 5 has the same observing status as the positively reflected surface of a plane. A defective part 21 has the same irregular reflection as that of a plane. Consequently the clear difference of luminance levels between the non-defective part 20 and the defective part 21 appears. Thus scattered lighting can be easily realized by using an ordinary microscope.

Inventors

• 👤 Shigeru Kondo
• 👤 茂 近藤

Bibliographic Details