Thermal head

Abstract

Abstract PURPOSE:To obtain a thermal head having excellent heat conductivity and excellent wear resistance and suitable for heat-sensitive recording by providing a carbon or carbon-based wear-resistant layer on a heating element layer on a base plate. CONSTITUTION:On a heating element layer 4 on a base plate 1, a carbon or carbon-based wear-resistant layer 5 is formed by a plasma gaseous phase method. In short, plasma is generated by producing glow or arc discharge by the addition of an electromagnetic energy of DC high-frequency (500kHz-50MHz) or micro-wave frequency (2.45GHz) under a reduced pressure of 0.01-10torr to activate and decomposite reactive gas, e.g., such hydrocarbon bases as ethylene, propane, etc., and thereby a film made of non-crystalline or semi-noncrystalline insulating carbon of based on a carbon containing 30mol% or less H and Si is formed.

Inventors

• 👤 Shunpei Yamazaki
• 👤 舜平 山崎

Bibliographic Details