Thermal head

Abstract

Abstract PURPOSE: To obtain a thermal head which is hard to be oxidized, is stable in resistance value and permits selection of specific resistance up to a high value by using a heating resistor composed of metal boride and carbon. CONSTITUTION: A thin film heating resistor 2 which is composed of metal boride and carbon by making sputtering or other of the target of metal boride in a mixed atmosphere of argon and methane to let carbon be contained at more than 0.005 of the total weight of the metal in atom ratio in a resistor is formed on a substrate 1 composed of an electrical insulator such as ceramics, glass or other. An electric conductor 3 which is formed of good electric conductor such as aluminum, gold or other and supplies electric power to the heating element 2 is provided thereon. The heating element 2 and conductor 3 are combined with the silicon oxide, tantalum oxide or these having been made by, e.g., electron beam vapor deposition, sputtering ot other to form a protecting layer 4. Thereby the life of the head may be made much longer. COPYRIGHT: (C)1979,JPO&Japio

Inventors

• 👤 Toshitami Hara
• 👤 Akira Niimi
• 👤 Masahisa Fukui
• 👤 Yoshiaki Shirato
• 👤 Yoshiki Hajimoto

Bibliographic Details