Manufacture of optical plain surface circuit

Abstract

Abstract PURPOSE:To form an optical plain surface circuit having a branching and junction part having less scattering loss, by making the refractive index distribution in a sectional direction of an optical waveguide into a graded distribution by an ion exchange method. CONSTITUTION:A part corresponding to an area forming an optical waveguide on a substrate 1 is exchanged by the ion contributing to enlarge a refractive index to form a high refractive index layer. Then, the unnecessary part of the high refractive index layer is removed by etching to form a prescribed optical waveguide pattern 2. Afterwards, the surface of the pattern 2 is exchange by the ion contributing to make a refractive index small and the distribution in which the refractive index in a section of the waveguide 2 is high in the center and is decreased as it goes to the circumference is given. Thus, by making the refractive index distribution in a sectional direction of the optical waveguide into a graded distribution, an optical plain surface circuit having a branch and juction part having less scattering loss is formed.

Inventors

• 👤 Eiji Okuda
• 👤 奥田　栄次
• 👤 Noboru Yamamoto
• 👤 昇 山本
• 👤 Tetsuya Yamazaki
• 👤 哲也 山崎

Bibliographic Details