Pressure resistance and explosionproof absolute pressure transducer

Abstract

Abstract PURPOSE:To raise the prolonged stability of a zero point, to measure low absolute pressure, and to elevate pressure resistant and explosionproof properties, by providing a vacuum reference chamber in connection with a space surrounded by a recessed place of a pressure receiving diaphragm, and a silicon base. CONSTITUTION:When pressure P is put on a liquid partition diaphragm 2, the pressure P transmits a sealing liquid 19, and stress is generated in a pressure receiving diaphragm 10. In a recessed place of a surface on which a diffusing strain gauge resistance 11 has been formed, a vacuum reference chamber 22 is formed, the resistance 11 detects differential pressure between a vacuum and the pressure P, and a resistance value is varied. Accordingly, absolute pressure can be converted to a voltage variation by forming a bridging circuit. Also, a sealing liquid 27 of a chamber 14 surrounded by a sensor housing 5 and a cover plate 25 prevents gas from going into the chamber 14 even in case when leak exists when welding the cover plate 25 and a casing 1, and elevates explosionproof performance against generation of a spark in a connecting part, etc. of an airtight terminal 7 and an output lead wire 15 in the chamber 14.

Inventors

• 👤 Tadahiro Hayashi
• 👤 林　忠広

Bibliographic Details