Patent JPS5821333A successfully refreshed from Google Patents.
JPS5821333A
Expired / Lapsed
JP
⏱️ 0.0 years remaining
Sample holding device for ion beam etching equipment
Assignee: Kokusai Denki Electric Inc
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Filing: 1981-07-30
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Granted: —
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Expires: 2001-07-30
Abstract
Abstract Translated from Japanese (57)【要約】本公報は電子出願前の出願データであるた め要約のデータは記録されません。 (57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Inventors
- 👤 Ryoji Tsunoda
- 👤 角田 良二
- 👤 Tsukasa Yaita
- 👤 矢板 司
- 👤 Akinosuke Takahashi
- 👤 高橋 昭之助
Bibliographic Details
Application Number
—
Jurisdiction
JP
Data Source
google_patents
Last Synchronized
2026-11-04 19:26
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/34; H01J37/3411; H01J37/3435
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
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