Patent JPS58200534A successfully refreshed from Google Patents.
JPS58200534A
Expired / Lapsed
JP
⏱️ 0.0 years remaining
Forming method for pattern
Assignee: Hitachi Ltd
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Filing: 1982-05-19
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Granted: —
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Expires: 2002-05-19
Abstract
Abstract Translated from Japanese (57)【要約】本公報は電子出願前の出願データであるた め要約のデータは記録されません。 (57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Inventors
- 👤 Kozo Mochiji
- 👤 広造 持地
- 👤 Takeshi Kimura
- 👤 剛 木村
Bibliographic Details
Application Number
—
Jurisdiction
JP
Data Source
google_patents
Last Synchronized
2026-11-02 19:12
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70425; G03F7/7045; G03F7/004; G03F7/022
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
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