Probe card device

Abstract

Abstract PURPOSE:To provide a required needle pressure when an edge sensor is contacted with IC surface, by a method wherein the edge sensor is made shorter than a probe pin. CONSTITUTION:A probe card 101 is moved downwards and a probe pin 103 is contacted with Al bonding pad 106. The probe card 101 is further moved downwards and the pressure is increased and the height h is set to obtain a proper needle pressure. Contacting of an edge sensor 104 with surface IC 102 is detected electrically from small movement of needle of the pin 104, and the dropping is stopped in this time. In this constitution, contact failure or surface damage on account of the unsuitable needle pressure can be prevented.

Inventors

• 👤 Koichi Osawa
• 👤 大沢　弘一
• 👤 Shigeo Aihara
• 👤 相原　「しげ」夫

Bibliographic Details