Manufacture of colored solid image pickup element substrate
Abstract
Abstract PURPOSE:To obtain a colored solid image pickup element which is easily manufactured and inexpensive, by forming a micro-color filter directly on a solid image pickup element substrate by using the photographic technique using silver halide. CONSTITUTION:A light receiving section 14 and a lead wire taking out section 16 are installed on a solid image pickup element substrate 10, and they are covered with a solvent penetration preventing layer 20 which prevents each treatment liquid to be used in the removing process of the silver halide emulsion layer and the forming process of the micro-color filter on the silver halide emulsion layer from contacting with the surface of the substrate 10. Then, a silver halide photographic emulsion layer 22 is formed on the surface of the solvent penetration preventing layer 20 formed on the surface of the solid image pickup element substrate 10. Thereafter, the silver halide emulsion layer 22 at a part which corresponds to a bonding pad part 16 is removed and a color separation filter 26 of red, green, blue, etc., corresponding to each picture element of the light receiving section 14 is formed. Finally, a protective layer 28 is installed on the whole surface of the solid image pickup element substrate 10 thus formed. Thus the colored solid image pickup element is manufactured.
Inventors
- 👤 Masamichi Sato
- 👤 正倫 佐藤
- 👤 Eiichi Hasegawa
- 👤 栄一 長谷川
- 👤 Koji Shimanuki
- 👤 嶋貫 孝二
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