Power source device for plasma experimental apparatus

Abstract

Abstract PURPOSE:To eliminate the lowering of a power factor caused by a reactive power by providing a chopper for controlling a DC current and a polarity changeover switch for flowing a coil current in both directions. CONSTITUTION:There are provided a rectifier 2 for rectifying full wave of alternating current supplied through a transformer 1 for a rectifier, a current controlling chopper 4 opening or closing with high frequency wave between the output side of the rectifier 2 and a load (trochoidal magnetic field coil) 6, and a polarity inverting switch 5 for inverting the polarity of the current supplied to the load from the chopper 4. Since the chopper 4 and the switch 5 are employed in this manner, the responsiveness of the current control can be improved, and the polarity of the current can be inverted regardless of the power frequency by firing the reverse polarity chopper 4. Since the operation of the AC power and the rectifier 2 including the capacitor 3 can be isolated, the decrease in the power factor caused by the reactive power can be eliminated.

Inventors

• 👤 Hisashi Masui

Bibliographic Details