Cassette holder for electron beam exposure

Abstract

Abstract PURPOSE:To enable a cassette to be accurately positioned, and be secured and held certainly and steadily, by settin the position by pushing the cassette horizontally on a table, and releasing the positioning mechanism at the same time as, or after the opertion of securing mechanism of pushing vertically. CONSTITUTION:Sides 3a and 3b of a Cassette 3 which holds and secures a sample 2 are attached to stoppers 4 and 5 installed on a table 1. The cassette is positioned by being pushed on the sides with a steel ball 8 by a spring 9. A holder 23 (also 33) of a holding mechanism 20 (a holding mechanism 30 is furnished on the left side) is lifted from the table 1 by a pin 24 as a fulcrum. After positioning, the cassette 3 is pushed and secured with steel balls 21 and 31 furnished with springs by pushing down the holder 23 (also 33). At this moment, an end point 40a of a pawl 40 fixed at the holder 23 pushes the steel vall 8 back, and positioning mechanism is released. By this method, cassettes can be positioned accurately with less friction, and steadily secured with less relative displacement to the side directions of the cassette table.

Inventors

• 👤 Toru Tojo
• 👤 Kazuyoshi Sugihara

Bibliographic Details