Organic treating apparatus for semiconductor substrate

Abstract

Abstract PURPOSE:To provide a safety semiconductor substrate organic treating apparatus by isolating an organic treating tank and a treated material conveying tank when organically treating the semiconductor substrate. CONSTITUTION:When a semiconductor substrate is organically treated so as to improve the bonding of a photoresist to the substrate, an organic treatment tank and a treated material conveying tank 6 are isolated. A treated material 5 is set at a treated material conveying box 6, is moved to the organic treatment tank, it organically treated with vapor 4a produced from organic solvent 4, while the box is then moved to the original position, gas is exhausted, and the material is then removed. Thus, a worker is not adversely affected detrimentally, but instead, his safety is secured.

Inventors

• 👤 Shuichi Hayashida

Bibliographic Details