Coupling element for charge

Abstract

Abstract PURPOSE:To determine the transfer direction of charges unidirectionally by a simple two-phase clock drive type by a method wherein the first and the second dielectric layers are formed on the surface of a semiconductor substrate, and a plurality of conductor electrodes are arranged on the surface at regular intervals. CONSTITUTION:A thermally oxidized SiO2 layer 12 is formed on the surface of the P type Si substrate 11, and an Si3N4 layer 13 is made up on the layer 12. A plurality of Al electrodes 14 are disposed adjacently on the surface of the layer 13. Each electrode 14 is wired to terminals 16 by wiring 15. In such constitution, electrons in the substrate 11 are trapped on the interface of the layer 12 and the layer 13 or in the layer 13 through the layer 12 when not less than 20V positive pulses to the substrate 11 are applied to the terminals 16. Accordingly, the concentration of holes in the vicinity of the surface of the substrate 11 under the electrodes 14 becomes higher than the concentration of holes in the substrate 11. The difference of the concentration of electrons in the vicinity of the surface of or in the substrate 11 under the electrodes 14 is made differ successively by increasing or decreasing the amount of charges injected and held in order according to the arrangement of the electrodes 14. Thus, the transfer direction of charges is determined in two-phase clock drive.

Inventors

• 👤 Tatsuo Fuji

Bibliographic Details