Surface electrometer

Abstract

Abstract PURPOSE:To make it possible to perform accurate measurement with excellent moisture proof and difficultly electrifiable characteristics, by forming a measuring electrode, a preamplifier, and a shielded electrode on the same ceramic substarate by evaporation or printing. CONSTITUTION:The same ceramic substrate 10 is used as a printed board for the measuring electrode and the preamplifier. The measuring electrode 11 is printed on the back of said substrate. The vicinity of said electrode is enclosed by the printed shielded electrode 12 so as to remove the induction of a chopper driving signal. In the meantime, on the surface of the substrate 10, the other circuit pattern of the shielded electrode 12 is printed, and resistors R1-R3 are printed by using printing resistors for metal glaze. An FET is temporarily fixed by cream solder and brazed by using a hot plate. In this constitution, moisture proof is excellent, electrification is hardly caused, so accurate measurement can be performed.

Inventors

• 👤 Koji Suzuki
• 👤 Koki Kuroda
• 👤 Joji Nagahira

Bibliographic Details