Detector for electron beam device

Abstract

Abstract PURPOSE:To minimize an area which is occupied by detectors in the wall surface of a sample chamber and simultaneously detect a number of signals by installing each detector on a linear conical member. CONSTITUTION:The electron beam 2 emitted from a mirror cone 1 is irradiated on the sample 5 on its bench 4 which is fixed in a sample chamber 3. The sample 5 is cooled by a coolant 10 which is provided on the wall section of the sample chamber. The signals from this sample are detected by a secondary electron detector 14 which is supported on a flange 11 and mounted in a cone 13 that is fixed by a lock nut 12, a low sensitivity reflection electron detector 15, a CL detector 16 which detects cathode luminescence, a high sensitivity reflection electron detector 17, etc. The secondary electrons are pulled by the high voltage which is supplied from a terminal 18 and incident on the secondary electron detector 14. Light is converted and removed from a cable 19. Another detection signal is removed from a terminal 18A.

Inventors

• 👤 Yoshihisa Namikawa
• 👤 Yoshimasa Unno

Bibliographic Details