Manufacture of thin film

Abstract

Abstract PURPOSE:To remove powdered dust, and to prevent the generation of a pin hole by electrifying and making travel a high molecular base material prior to evaporation. CONSTITUTION:A flexible high molecular base material 3 is wound by means of a winding system consisted of a forwarding shaft 8, a winding shaft 9, rollers 6, expander rollers 7 and a rotary drum 5. A shutter 10 is opened in a process in which the speed of the base material wound increases to the predetermined speed of winding, and vapor obtained by heating an evaporating material 1 by electron beams, etc. is evaporated. The high molecular base material 3 is electrified and made travel prior to the starting of evaporation, and dust in an evaporator is attached and removed.

Inventors

• 👤 Koichi Shinohara

Bibliographic Details