Manufacture of substrate having stuck electrically conductive transparent film

Abstract

Abstract PURPOSE:To form a vacuum-deposited film with superior electric conductivity, heat stabilty and transparency by adding a specified percentage of Cl2 to the total amount of In2O3 and SnO when a mixture of them is vacuum-deposited on a glass substrate. CONSTITUTION:In2O3 or SnO-contg. In2O3 is vacuum-deposited on a glass substarate to form an electrode for a liq. crystal display element. At this time, to the starting material for vacuum deposition is added a chloride such as indium chloride, tin chloride dihydrate or dibutyltin dichloride by 0.02-0.5wt% as chlorine to the total amount of the In2O3 and SnO. Thus, the vacuum-deposited film has superior transparency without deteriorating the electric conductivity and heat stability, and an electrode substrate having the film for the liq. crystal display element can be manufactured.

Inventors

• 👤 Shozaburo Nishikawa
• 👤 Hiroshi Ikeizumi

Bibliographic Details