Surface acoustic wave resonator

Abstract

Abstract PURPOSE:To decrease secular change of resonance frequency, by forming a grating reflector with aluminum containing copper or silicon. CONSTITUTION:In surface acoustic wave resonator providing an interdigital electrode 32 and grating refectors 33, 34 on a piezoelectric substrate 31, the grating reflectors 33, 34 are formed with alminum containing several percentage of copper or silicon (practically <=10%) as impurity. Thus, the deterioration of reflectors can be less and the secular change of the resonance frequency can be prevented. As reasons that the deterioration of aluminum containing impurity is less, impurity is separated to crystal grain of the aluminum and boundary is formed by taking this as a core, allowing to prevent the deterioration due to fatigue of metal.

Inventors

• 👤 Yasuo Ehata
• 👤 Shigefumi Morishita
• 👤 Koji Sato

Bibliographic Details