Detecting element for combustible gas
Abstract
Abstract PURPOSE: To improve the secular stability and gas response characteristic, by laminating the resistor made of platinum wire, oxide coating and oxidation catalyst on the support electrode successively. CONSTITUTION: After 5W25μm extremely fine platinum wire is fixed on the support electrode as resistor, ≤5μm oxide coating such as Al 2 O 3 , TiO 2 , SnO 2 and ZnO 2 is provided and moreover ≤5μm thickness of oxidizing catalyst such as Pt, Pd, Ru, NiO and CoO is stuck to said coating by the method of vapor deposition or plating. Hereby, the heat capacity of gas detection part is made extremely small and time necessary for stabilizing the temperature of the resistor at the time of applying voltage to the resistor is made within 5W10msec. Also, the gas response characteristic is improved and the output of gas sensitivity is saturated within 10W100msec. Moreover, the platinum wire is protected by the oxide coating and it is stable even if exposed in a high concentration gas and then, the secular stability is improved. COPYRIGHT: (C)1981,JPO&Japio
Inventors
- 👤 Takashi Matsuzawa
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