Manufacturing apparatus

Abstract

Abstract PURPOSE:To eliminate the pollution of a manufacturing apparatus and to improve the yield of the apparatus by executing all product management, process control, and treatment and conveyance control with a computer, organically controlling the respective control sections and smoothly automating the flow of works. CONSTITUTION:The treating types and the lots of works 39 are confirmed (product management) in an automatic storage machine 28 by a central control device 29, to examine the surplus, mechanism of the works in the respective sections 15, 17... 27 and to determine the priority sequency of the products. Vacant treatment units are detected, a work conveying machine 43 is driven according to the priority sequency to prepare the conveyance, the complete lots are detected in parallel, and the works are contained in a vacant container 28. After inspecting all treating units, the advancement of the works are always estimated to treat, convey and transfer the works. A central control device (computer) executes the work management, product control, treating condition control, information collection, and sequence control to automatically process all the works in an air conditioned and dust free chamber 31 to prevent contamination of wafers. This configuration can process the works of high quality in high efficiency.

Inventors

• 👤 Hiroto Nagatomo
• 👤 Hiroshi Maejima
• 👤 Jun Suzuki
• 👤 Yoshiyuki Fujikawa

Bibliographic Details