JPS5336478A
Expired / Lapsed
JP
⏱️ 0.0 years remaining
Automatic lead-out device for wafer from cartridge
Assignee: Hitachi Ltd
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Filing: 1976-09-17
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Granted: —
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Expires: 1996-09-17
Abstract
Abstract PURPOSE: To eliminate the cartridge fall-down at the wafer lead-out time as well as the position shift at the restoration time to ensure an assured holding at the holder, thus securing a smooth lead-out of the wafer from the cartridge with no damage of the wafer. COPYRIGHT: (C)1978,JPO&Japio
Inventors
- 👤 Hiroshi Maejima
- 👤 Masato Ishioka
Bibliographic Details
Application Number
—
Jurisdiction
JP
Data Source
google_patents
Last Synchronized
2026-10-27 15:10
CPC Classifications
—
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