Microwave plasma treating apparatus

Abstract

Abstract PURPOSE: To provide a titled apparatus which is provided with a means of coupling plasma by the magnetic flux produced by the microwave current flowing in an internal conductor, a plasma expanding means in a plasma forming part, etc., and which permits conversion of a greater part of input microwave energy to plasma. CONSTITUTION: The microwave electric power outputted from a magnetron 1 is transmitted to a square wave guide 2 and is further reflected by a door knob antenna 3a and is transmitted to a coaxial line 3. Almost all the microwave electric power flowing in the line 3 is transmitted to a plasma waveguide constituted of the plasma 9-1 and pipe 7-1 in a plasma forming pipe 7-1 by sufficiently electromagnetically coupling the plasma 9-1 and coupling loop 3c in a plasma forming pipe 4-1. On the other hand, a gas 5 such as CCl 4 is made into plasma 9-1 by the pipe 4-1, and this plasma is flowed to a conical pipe part 4a-1, whereby expanded plasmas 9a-1W9c-1 are formed. The resulting activated gas is sent into an evacuated vacuum chamber 6-1, whereby the sample 6a-1 on a base 6b-1 is uniformly etched. COPYRIGHT: (C)1981,JPO&Japio

Inventors

• 👤 Shuzo Hattori
• 👤 Koji Moriyama
• 👤 Masashi Kikuchi

Bibliographic Details