Thin film pattern forming mask

Abstract

Abstract PURPOSE: To obtain the vibrator or the like of improved workability, reliability, etc. by using the material having the coefficient of expansion nearly equal to that of the vibrator or the like for the material of the mask used for forming exciting electrodes or the like on the surface of the piezoelectric crystal vibrator or the like through sputtering, vapor deposition or the like. CONSTITUTION: For example, when a thin film forming material is a crystal vibrator 8, crystal is used for the material of the thin film pattern forming mask. In this case, the thin film pattern forming mask 9 is manufactured by using the plate cut out at the reduced angles of the protrusions 10 in the +X direction produced at the time of etching a Z-plate by turning the same 0W+30° about the X-axis. The mask 9 is used for forming the side-face electrodes of piezoelectric tuning fork type which are driven by electrodes only on the main faces of the front and back faces and side faces of mainly the vibrator 8. The equality of the coefficient of expansion of the mask 9 and vibrator 8 is this way obviates peeling of the mask 9 when the electrodes are sputtered, thus permitting the achievement of the higher reliability and yield of the crystal vibrator or the like of extra thin type and microminiature size for wristwatches or the like. COPYRIGHT: (C)1980,JPO&Japio

Inventors

• 👤 Akihito Kudo
• 👤 Hironori Shimazu
• 👤 Hideo Tabata

Bibliographic Details