Ion plating apparatus for tube inside using laser beam

Abstract

Abstract PURPOSE:To enable the inside of a long-size tube to be plated by attaching a laser generator to the tube provided with a condenser, gas exhaust and feed means, etc. and constituting them so that the tube inside can be plated. CONSTITUTION:Tube 12 to be plated is hermetically sealed with flange 10 and laser beam window 3, and vacuum pump 15, condenser 6 holder 7 which doubles as a gas feed pipe, etc. are attached to tube 12. High voltage cable 13 is connected to tube 12 and used as a cathode, and plating metal 8 as an anode is held in tube with holder 9. Laser beams from laser generator 1 are centered at metal 8 through window 2 and condenser 6, whereby metal 8 is melted, evaporated, and ionized by glow discharge to ion-plate the inside of tube 12. Since a heat source unit can be placed far away by making use of laser, the inside of long-size tube 12 is enabled to be ion- plated.

Inventors

• 👤 Torazo Uchiki
• 👤 Munetaka Kuribayashi
• 👤 Hisayoshi Okabayashi

Bibliographic Details