Probe card

Abstract

Abstract PURPOSE: To produce no positional gap between a circuit and a connecting part by a method wherein a connecting part connecting to an electronic circuit in the center part and an electric pattern having an external terminal on the outer edge of a highly dielectric substrate, are formed to be used as a probe. CONSTITUTION: An electric pattern 3 is formed on a highly dielectric substrate 1 to be covered with an insulation layer 5 for use as a probe card. At the center part of this pattern 3, a connecting part 2 and an external terminal 4 are provided, which match with each protruded electrode 7 of an IC chip 6 to be inspected and are exposed from the insulating layer 5. They are prepared by the evaporation or photographic etching of the metals like Au, Cr, Ni and Cr. In this constitution, a connection to the electrode 7 can be done only by placing the IC chip 6 inside the connecting part 2 resulting in causing no positional gap. A plural number of different cards corresponding to the shape of the chip must be prepared. COPYRIGHT: (C)1980,JPO&Japio

Inventors

• 👤 Masami Umetsu

Bibliographic Details