Piezoelectric vibrator

Abstract

Abstract PURPOSE:To form a piezoelectric vibrator with small aging variation and stable resonance frequency, which can be worked by photolithography, by covering a zinc-oxide film with an insulating film of silicon dioxide, silicon monoxide, etc. CONSTITUTION:On the top surface of tuning-fork type piezoelectric vibrator unit 1 of 1mum-0.5mm in thickness, zink oxide film 4 is provided to a thickness of 0.1mum-50mum. ON zinc oxide film 4 protected by insulating film 5 (thickness; 0.05mum-10mum) of silicon dioxide, silicon monoxide, etc., electrodes 2a and 2b are provided. When electrodes 2a and 2b are applied with positive and negative voltages respectively, metallic vibrator 1 is held at a potential intermediate between those of 2a and 2b and piezoelectric property of the zink-oxide film contracts the outside of the tuning fork while its inside is expanded, so that inflection vibration in parallel to a thin plate surface can be attained. Further, zink-oxide film 4 can easily be worked by photolithography because of protection by insulating film 5, so that it will not change even in atmospheric gas.

Inventors

• 👤 Tsuneo Yamazaki

Bibliographic Details