High sensitivity piezo-electric body and its manufacture

Abstract

Abstract PURPOSE: To enlarge a piezo-electric modulus and a coefficient of coupling of an electric machine, to improve flexibility and to easily film work this piezo-electric body, by mounting a piezo-electric, high molecular film onto an anode and a target consisting of a material, to which an oxide film is formed, backed with copper onto a cathode. CONSTITUTION: An anode 7 and a cathode 8 are opposed through a shutter 6 at one end of a vacuum tank 1, and a substrate, a piezo-electric, high melecular film 9, is placed on the anode 7 and a target 11 composed of a material, to which an oxide film is made up, backed with copper 10 on the cathode 8. Thus, film working can be facilitated, a piezo-electric modulus and a coefficient of coupling of an electric machine can be aggrandized and flexibility can be improved. COPYRIGHT: (C)1980,JPO&Japio

Inventors

• 👤 Yoshinori Fujimori
• 👤 Hiroshi Yoshioka

Bibliographic Details