Color filter

Abstract

Abstract PURPOSE: To obtain the filter which is high in resolving power, is superior in endurance and does not require electro-chemical wet type treatment by providing the shield parts which optically shield between respective color elements and depositing dye materials in the porous layers vapor-deposited in the opening parts. CONSTITUTION: If necessary, a protecting layer 28 of MgF 2 , SiO 2 , etc. is formed on on a substrate 1 such as solid-image sensing elements such as CCD and BBD and a metal mask having stripe-form openings is superposed thereon, thence opaque nonmetallic material such as V 2 O 3 is vacuum-evaporated. Thence, the metal mask is rotated in the orthogonal directin and again vapor deposition is done in the similar manner to form shield parts 5. Next, ZrO 2 or the like is vacuum-evaporated by way of a mask to form a porous color receptive layer. While the mask is being replaced after this, dyes 29W31 of blue, green and red are vacuum-evaporated. If necessary, a protecting film 33 of paraxylene or the like is vacuum-evaporated thereon. This color filter does not use wet type treatment and has high resolving power and endurance. COPYRIGHT: (C)1980,JPO&Japio

Inventors

• 👤 Shigetaro Ogura
• 👤 Hiroyuki Imataki

Bibliographic Details