Production of substrate for gas sensor

Abstract

Abstract PURPOSE: To produce the substrate for gas sensors which is superior in thermal responsiveness and is stable in operating characteristic by providing a conductive layer for heating on the substrate, covering therein with an insulator thin film layer and connecting lead wires to said conductive layer. CONSTITUTION: Platinum lead wires 13a, 13b, 13c are placed on an insulation substrate (for example, alumina green sheet) 11, thence an insulation substrate 14 having through-holes 14a, 16b, 16c is superposed thereon. Both substrates 11, 14 are then thermocompression-bonded. Next, a conductor layer 12 for heating is formed on the substrate 14 by using platinum paste and at the same time, platinum plaste is injected into the through-holes 14aW14c to electrically connect the lead wires 13a, 13c and both end portions of the conductor layer 2, after which insulation paste is further coated thereon and baked to lamination-form the insulator thin film layer 16, whereby the substrate for sensors is provided. COPYRIGHT: (C)1980,JPO&Japio

Inventors

• 👤 Shinji Kimura
• 👤 Hiroshi Takao
• 👤 Hiroyuki Aoki
• 👤 Satoshi Abe

Bibliographic Details